The semiconductor manufacturing process involves many steps, including, but not limited to, film deposition, photolithography, etching, and chemical mechanical polishing (CMP). Contamination can ...
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These models can be used either offline to provide the optimal process cycle, or online to provide optimal, real-time process control [3]. This is the target of the iREMO project (www.iremo.eu), an EC ...
In semiconductor manufacturing, especially in electrical test data, but also in other parameters, there are often sets of parameters that are very highly correlated. Even a change in the correlation ...
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